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利用化学喷雾沉积法(CSD法)在未定向的ZrO_2单晶衬底上获得了零电阻温度高于85 K和转变宽度为2 K、厚度小于5 μm的YBa_2Cu_3O_(7-δ)超导薄膜.以XRD、XPS和SEM等手段研究了不同制备条件下薄膜的晶体结构、电子结构和显微形貌,讨论了材料膜形成机制及其与超导电性的关系。
The YBa 2 Cu 3 O 7 - δ superconducting thin films with zero resistance temperature higher than 85 K, transition width 2 K and thickness less than 5 μm were obtained by chemical spray deposition (CSD) on unoriented ZrO 2 single crystal substrate. The crystal structure, electronic structure and microstructure of the films were investigated by XRD, XPS and SEM. The formation mechanism of the films and the relationship between them and superconductivity were discussed.