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The extreme ultraviolet and soft x-ray sources are widely used in various domains.Suppressing higher order harmonics and improving spectral purity are significant.This paper describes a novel method of higher order harmonics suppression with single order diffraction gratings in extreme ultraviolet and soft x-ray.The principle of harmonic suppression with single order diffraction grating is described,and an extreme ultraviolet and soft x-ray non-harmonics grating monochromator is designed based on the single order diffraction grating.The performance is simulated by an optical design software.The emergent beams of a monochromator with different gratings are measured by a transmission grating spectrometer.The results show that the single order diffraction grating can suppress higher order harmonics effectively,and it is expected to be widely used in synchrotron radiation,diagnostics of laser induced plasma,and astrophysics.