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运用sol-gel技术制备了(Pb,La,Ca)TiO3(简写为PLCT)铁电薄膜;利用XRD、SEM、AFM和EDAX分析了PLCT薄膜的结构、表面形貌和组分。XRD衍射结果表明,PLCT薄膜呈钙钛矿结构。随着退火时间的增加,PLCT薄膜的XRD衍射峰的强度也随之增加。SEM、AFM分析表明,PLCT铁电薄膜表面平整、致密、无裂缝。EDAX分析表明,PLCT薄膜的实际组分十分接近设计组分。利用PFM分析了PLCT薄膜的电畴结构,发现随着退火时间的增加,PLCT薄膜的电畴由细小圆点状逐渐增大并形成片状电畴。
(Pb, La, Ca) TiO3 (abbreviated as PLCT) ferroelectric thin films were prepared by sol-gel technique. The structure, surface morphology and composition of the films were analyzed by XRD, SEM, AFM and EDAX. XRD diffraction results show that the PLCT film has a perovskite structure. With the increase of annealing time, the intensity of XRD diffraction peak of PLCT film also increases. SEM and AFM analysis showed that the surface of PLCT ferroelectric thin film was smooth, dense and without cracks. EDAX analysis shows that the actual composition of the PLCT film is very close to the design component. The electric domain structure of PLCT thin film was analyzed by PFM. It was found that with the increase of annealing time, the domain of PLCT thin film gradually increased from fine dot to form patchy domain.