论文部分内容阅读
气体传感器的结构形式通常有接触燃烧型、陶瓷烧结型和气敏感场效应晶体管型等。陶瓷烧结型的传感方式是基于金属氧化物半导体(如SnO_2、ZnO和γ-Fe_2O_3)吸附气体分子后表面电阻发生变化的原理来实现的。 通常将氧化物与有机粘合剂混匀后塗在陶瓷管的表面,在高温下烧结成型。本试验采用真空镀膜法,在陶瓷管表面均匀地沉积一层金属Sn膜,然后将Sn膜氧化成SnO_2膜。这种膜均匀、牢固、敏感性能较好。实验表明,这是一种制作气敏元件的可行方法。
The structure of gas sensors are usually contact combustion type, ceramic sintered and gas-sensitive field-effect transistor type. The ceramic sintered sensing method is based on the principle that the surface resistance of a metal oxide semiconductor (such as SnO 2, ZnO and γ-Fe 2 O 3) adsorbs gas molecules to change. Oxide and organic binder are usually mixed after coated on the surface of the ceramic tube, sintered at high temperatures forming. In this experiment, a vacuum deposition method was used to uniformly deposit a metal Sn film on the surface of the ceramic tube, and then the Sn film was oxidized into a SnO 2 film. This film is uniform, strong, sensitive performance is better. Experiments show that this is a viable method of making gas sensors.