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介绍了一种基于压电陶瓷驱动器驱动的二维微定位平台。在结构上,定位平台采用多功能微驱动接口模块实现位移的增倍输出,采用折叠梁型弹性移动副实现平台的低阻力特性。因此,整体平台不但具有结构紧凑的特点,也达到了最大限度增大运动范围的目的。基于悬臂梁结构的单元刚度矩阵,推导了这种折叠梁型弹性移动副的刚度。将文中提出的新型二维微定位平台结构划分为6部分并分别建立了相应的刚度矩阵,根据具体的链接关系将6个子刚度矩阵联立获得微定位平台整体刚度的数学模型。最后给出了运算实例,验证了上述刚度分析方法的正确性。
A two-dimensional micro-positioning platform based on piezoelectric ceramic actuator is introduced. Structurally, the positioning platform adopts multipurpose micro-drive interface module to realize the double output of displacement, and the low resistance characteristic of the platform is realized by the folding beam-type elastic moving pair. Therefore, the overall platform not only has the characteristics of a compact structure, but also to achieve the purpose of maximizing the range of motion. Based on the element stiffness matrix of cantilever structure, the stiffness of the folded beam-type elastic moving pair is deduced. The structure of the new two-dimensional micro-positioning platform proposed in this paper is divided into six parts and the corresponding stiffness matrixes are respectively established. According to the specific linkages, six sub-stiffness matrices are obtained simultaneously to obtain the mathematical model of the overall stiffness of the micro-positioning platform. Finally, an example is given to verify the correctness of the above stiffness analysis method.