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点衍射干涉仪中小孔对准误差是影响衍射参考波面质量最主要的误差源。基于瑞利索末菲矢量衍射理论,建立了非傍轴高斯光束经小孔衍射的严格数学描述,对不同对准误差下的小孔衍射波面误差进行了分析,在分析中特别考虑了会聚光斑大小的影响。研究表明:小孔对准误差的引入使得衍射波面偏差迅速增大,且衍射波面偏差随对准误差的增大呈线性增长;相同对准误差下,衍射波面偏差随会聚光斑半径的增大而减小,要获得同等衍射波面偏差,允许的对准误差随会聚光斑的增大呈近同倍数增长。给出了0.5~3μm小孔在不同会聚光斑直径和小孔对准误差下的衍射波面误差分布数据,研究结果可为点衍射干涉仪中会聚透镜的选取、小孔对准精度要求的确定以及小孔衍射波面误差的估计提供重要参考数据。
Point diffraction interferometer in the hole alignment error is the most important error source of diffraction reference wavefront quality. Based on the Rayleigh Sommerfeld vector diffraction theory, a rigorous mathematical description of non-paraxial Gaussian beams through diffraction of small holes was established. The error of diffraction of small holes under different alignment errors was analyzed. In the analysis, the spot size Impact. The results show that the introduction of small hole alignment error causes the diffraction wavefront aberration to increase rapidly, and the diffraction wavefront aberration increases linearly with the increase of the alignment error. With the same alignment error, the diffraction wavefront aberration increases with the increase of the converging spot radius Decrease, to obtain the same diffraction wavefront deviation, the allowable alignment error with the converging spot increases nearly the same multiples. The error distribution data of diffraction wavefront of 0.5 ~ 3μm aperture at different converging spot diameter and aperture alignment error are given. The research results can be the selection of the condensing lens in point diffraction interferometer, the determination of the precision of aperture alignment and The estimation of the wavefront diffraction error of the aperture provides important reference data.