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介绍一种低温超高真空微波密封窗,经过多次液氮和常温之间的冷热冲击后,其漏气率不大于1.08×10~(-11)乇·升/秒。这种密封窗容易制作,造价低且性能良好。
A kind of low temperature and ultrahigh vacuum microwave sealing window is introduced. After several thermal shocks between liquid nitrogen and normal temperature, the leakage rate is not more than 1.08 × 10 ~ (-11) Torr · L / s. This sealed window is easy to make, low cost and good performance.