研究表面形状乃是全息干涉术的用途之一。但是,已知的方法都需要浸没介质,且准确度不高。本文介绍一种抛光表面形状的检验方法,不需要一般全息装置上的浸没介质,其准确度可达0.03μm。一般采用检验平晶~*来检验表面(例如,以表面声波来工作的装置中的基板)的抛光质量。这种方法非常简便,可是,往往由于检验 Research on the surface shape is one of the uses of holographic interference. However, the known methods all require immersion media, and the accuracy is not high. This article presents a test method for the shape of a polished surface without the need for immersion media on a typical holographic device with an accuracy of up to 0.03 μm. The inspection flatness ~ * is generally used to test the polishing quality of the surface (for example, the substrate in a device operating with surface acoustic waves). This method is very simple, however, often due to testing