论文部分内容阅读
微电子技术的巨大成功在许多领域引发了一场微型化革命,以加工微米/纳米结构和系统为目的的微米/纳米技术(Micro/Nano Technology)在此背景下应运而生。一方面人们利用物理化学方法将原子和分子组装起来,形成具有一定功能的微米/纳米结构;另一方面人们利用精细加工手段加工出微米/纳米级结构。前者导致了纳米生物学、纳米化学等边缘学科的产生,后者则在小型机械制造领域开始了一场新的革命,导致了微机电系统(MEMS)的诞生。
The tremendous success of microelectronics has led to a miniaturization revolution in many fields, and the backdrop to this is Micro / Nano Technology, which targets micron / nanostructures and systems for processing. On the one hand, people use physicochemical methods to assemble atoms and molecules to form micro / nano structures with certain functions; on the other hand, micro / nano structures are processed by fine processing methods. The former led to the emergence of marginal subjects such as nanobiology and nanochemistry, while the latter started a new revolution in the area of small machinery manufacturing that led to the birth of microelectromechanical systems (MEMS).