本文报道电化学扫描隧道显微镜(ECSTM)的研制技术,包括电子线路及绝缘探针尖的制备。研制的ECSTM中,试样和探针的电位能同时控制。绝缘探针的制备包括先用电化学腐蚀形成针尖,然后再在光学显微镜下绝缘,用扫描电子显微镜评定了绝缘针尖的性能。最后用研制的ECSTM现场研究了银、镍在高定向裂解石墨(HOPG)上的电沉积。 This article reports the development of Electrochemical Scanning Tunneling Microscopy (ECSTM) technology, including the preparation of electronic circuits and insulated probe tips. Developed ECSTM, sample and probe potential can be controlled at the same time. Insulation probes were prepared by first forming the tip using electrochemical etching and then insulating under an optical microscope to evaluate the performance of the insulated tip using a scanning electron microscope. Finally, ECSTM was used to study the electro-deposition of silver and nickel on highly oriented pyrolytic graphite (HOPG).