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CCD电荷耦合器件,作为一种新型的、高集成化的光电传感器,由于其独特的优点(集光电转换、自扫描输出为一体),近年来在高精度测量与摄象领域中得到了广泛的应用。本文讨论了用国产CCD-1728电荷耦合器件作为光电转换器件,利用波动光学中斐索干涉的原理,经过微计算机的高速处理,实现了对激光波长的高精度、快速、实时测量。目前测量的重复精度可达5×10~(-7)。一、原理系统布局如图1所示。
CCD charge-coupled device, as a new type of highly integrated photoelectric sensor, has been widely used in the field of high-precision measurement and imaging because of its unique advantages (photoelectric conversion and self-scanning output) application. In this paper, the CCD-1728 CCD is used as a photoelectric conversion device. Based on the principle of Fizeau interferometry in wave optics, a high precision, fast and real-time measurement of the laser wavelength is realized. The current measurement repeatability up to 5 × 10 ~ (-7). First, the principle of system layout shown in Figure 1.