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针对在纳米级运动控制中,传统PID算法的参数配置在抑制系统运动超调、提高系统定位精度,以及保障系统稳定性等方面存在矛盾的问题,提出了将模糊自适应PID控制器应用于该系统的方案。并基于大量工程整定实验,给出了针对纳米量级控制特点的模糊集设置和模糊整定规则,选取了合理的PID参数论域取值。实验结果表明,所设计的模糊控制器通过动态调整PID参数的增量,有效改善了微动台系统的动态性能,降低了动态响应的超调,且保证了在一定扰动下系统小于±10 nm的定位精度和鲁棒稳定性。验证了模糊自适应PID控制方法应用于纳米量级运动控制领域的有效性,以及基于实验的模糊规则设计、论域选取方法的可行性。
In the nanoscale motion control, the parameter configuration of the traditional PID algorithm has the problem of inhibiting the system from overshooting, improving the system positioning accuracy, and ensuring the stability of the system. A fuzzy adaptive PID controller is proposed System solutions. And based on a large number of engineering tuning experiments, the rules of setting fuzzy sets and fuzzy tuning for the characteristics of nano-order control are given. The reasonable value of domain of PID parameters is selected. The experimental results show that the designed fuzzy controller can effectively improve the dynamic performance of the micro-motion stage system and reduce the overshoot of the dynamic response by dynamically adjusting the increment of the PID parameters, and ensure that the system is less than ± 10 nm Positioning accuracy and robust stability. The validity of the fuzzy adaptive PID control method applied in the field of nanoscale motion control is verified, as well as the experimental design of fuzzy rules and the feasibility of domain selection method.