根据光热偏转光谱（ＰＴＤＳ）原理，研制成功光热偏转法薄膜热导测试系统，对大量试样进行了测量，结果同文献参考值符合较好，测量重复精度优于５％，为材料科学有关热性质的研究，特别是有关光热偏转薄膜热导率的研究提供了有力的检测手段，为研制高质量金刚石薄膜提供了依据。 According to the theory of photothermal deflection spectrum (PTDS), a successful thermal-deflection thin-film thermal conductivity testing system was developed. A large number of samples were measured. The results were in good agreement with the reference values ​​of the literature, and the repeatability of the measurement was better than 5% The research on thermal properties, especially the thermal conductivity of light-deflected films, provides a powerful means of detection and provides the basis for the development of high-quality diamond films.