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基于标量衍射理论,二元光学器件的衍射效率,微结构误差对衍射效率的影响,提出了一种准连续编码方法,并给出了加工非2n台阶所需掩模板的具体形式。在一定的加工条件和工艺水平下,采用这种编码方法,可以不增加加工成本和工序,仅通过新颖的掩模板设计方法充分利用现有加工条件和设备,使二元光学器件的衍射效率得到很大程度的提高。从而不仅能使一般混合系统的效率得到提高,更能充分发挥混合光学系统的成像能力。此编码方法的采用有利于推进二元光学器件的实用化。
Based on the scalar diffraction theory, the diffraction efficiency of binary optics and the influence of the microstructure error on the diffraction efficiency, a quasi-continuous encoding method is proposed and the specific form of the reticle required for machining non-2n steps is given. Under certain machining conditions and process levels, this encoding method can increase the diffraction efficiency of the binary optical device only by making full use of the existing processing conditions and equipment through novel mask design methods without increasing the processing cost and the process Greatly improved. Therefore, the efficiency of the general hybrid system can be improved, and the imaging capability of the hybrid optical system can be fully utilized. The adoption of this coding method is conducive to promoting the practical use of binary optics.