本文叙述了使用溶胶凝胶法在MgO(0 0 1)的衬底上制备铌酸锶钡薄膜的过程 ,膜层厚度可达 5 μm。通过X射线衍射、摇摆曲线、扫描、拉曼散射光谱等方法研究了薄膜的微结构性能 ,实验发现 ,铌酸锶钡薄膜具有了较好的 (0 0 1)方向的优先取向性能 ,并且随着薄膜厚度的增加 ,其晶体取向性也会随之不断改进。熔石英的透明衬底上生长的SBN薄膜具有较大的电致双折射效应 ,其有效电光系数能够高达 6 6 2× 10 -11m/V。 This paper describes the preparation of barium niobate thin films on a MgO (001) substrate by a sol-gel method. The thickness of the films is up to 5 μm. The microstructure and properties of the films were investigated by X-ray diffraction, rocking curve, scanning and Raman scattering spectroscopy. The results show that the strontium barium niobate films have good preferential orientation in the (001) direction, and As the film thickness increases, its crystal orientation will also continue to improve. The SBN thin films grown on the fused silica substrate have a large electrochromic effect, and the effective electro-optic coefficient can reach as high as 6 6 2 × 10 -11m / V.