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描述了一种用于精密工程中超精密测量的宽范围原子力显微镜．用管状扫描器工作时，测量范围可达２μｍ×２μｍ，能获得原子级的分辨率．当用新开发的定范围工作台扫描时，测量范围可为１４０μｍ×１４０μｍ；分辨率可在１～１００ｎｍ之间调节．
A wide-ranging AFM for ultra-precision measurement in precision engineering is described. Working with a tubular scanner, the measurement range up to 2μm × 2μm, atomic resolution can be obtained. The measurement range can be 140 μm × 140 μm when scanning with a newly developed calibration table; the resolution can be adjusted between 1 and 100 nm.