一、概述 固体摄像器件是在固体光敏器件和集成电路技术基础上发展起来的一种新型器件。六十年代人们就开始研制这种器件,到七十年代,由于MOS技术的进一步发展,就研制出这种新型的固体摄像器件,最有代表性的是电荷耦合器件CCD(Charge CoupledDevicl)和电荷注入器件CID(Charge In-jection Device)。 CCD器件虽问世不久,但由于其用途广泛,已得到各方面的普遍注意和重视。目前国内已有线阵CCD和面阵CCD,其位数有 First, an overview Solid-state imaging device is a new type of device developed on the basis of solid-state photosensitive devices and integrated circuit technology. In the 1960s, people started to develop this kind of device. By the 1970s, due to the further development of MOS technology, the new solid-state imaging device was developed. The most representative ones are Charge Coupled Device CCD and Charge Injecting device CID (Charge In-jection Device). Although the CCD device was introduced soon, it has gained universal attention and attention due to its wide range of uses. Currently there are linear CCD and area array CCD, the median there