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建立了电荷非平衡情况下superjunction(SJ)耐压结构的二维电场分布理论模型.获得了浓度和宽度非平衡、梯形n-/p-区和横向线性缓变掺杂三种非平衡SJ结构的电场分布.理论分析结果与二维器件数值仿真软件MEDICI的仿真结果符合良好.虽然给出的电场分布为三角级数形式,但仍能从中获得很多重要信息.特别地,由此可求出非平衡SJ结构的峰值电场和耐压.该结果有助于对SJ结构的深入分析.
A theoretical model of two-dimensional electric field distribution of superjunction (SJ) withstanding voltage under non-equilibrium charge is established. Three kinds of unbalanced SJ structures with unbalanced concentration and width, n- / p- and trapezoidal linear doping are obtained. The results of the theoretical analysis are in good agreement with those of MEDICI, a two-dimensional numerical simulation software.Although the electric field distribution is given in the form of trigonometric series, a lot of important information can still be obtained from it.In particular, The peak electric field and withstand voltage of unbalanced SJ structure contribute to further analysis of the SJ structure.