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提出一种具有亚毫微米分辨率的超精密位移传感器设计以供超精密技术应用。该传感器基于对物体表面反射光特殊点能量变化的高灵敏检测,此时,该表面须有小的位移。传感器由单光源、反射体、基准面、传送照明和反射光用的光纤束以及光电二极管装置组成。在工作时,单光源的光经光纤束后照明反射体和基准面。然后两个表面的反射光经光纤束传送到两个单独的、但
A super-precision displacement sensor with sub-nanometer resolution is proposed for ultra-precision technology. The sensor is based on highly sensitive detection of changes in the energy of the reflected light at the surface of the object, in which case the surface is subject to small displacements. The sensor consists of a single light source, a reflector, a reference plane, an optical fiber bundle for transmitting and reflecting light, and a photodiode device. At work, the light from a single source illuminates the reflector and the reference plane through the fiber bundle. The reflected light from both surfaces is then transmitted through fiber bundles to two separate, but