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一、引言 微细加工(micro-fabrication)技术主要研究对微小机械(micro-machine)的加工,其加工精度一般是10μm以下。微小机械产品由于具有尺寸小、精度高、能耗低、灵敏性和工作效率高等特点而在精密仪器、生物医学等领域有着广阔的应用潜力。研究微小机械及微细加工的目的不仅在于缩小机械产品的尺寸和体积,还在于通过微型化、集成化来探索和开发新原理、新功能的元件和系统,开辟一个新技术领域。快速成型技术是80年代后期出现的全新制造技术,具有可以迅速成型产品、产品加工不受形状和复杂程度的限制以及无需专用工具等特点。将快速成型技术应用于微小机械加工领域是近年来国际上兴起的一门新技术,由于它独有的一些特点,目前已受到国际学术界的广泛重视。
I. INTRODUCTION Micro-fabrication technology mainly deals with the processing of micro-machines, and its processing precision is generally below 10μm. Due to its small size, high precision, low energy consumption, high sensitivity and high efficiency, micro-mechanical products have broad potential in the field of precision instruments, biomedicine and the like. The purpose of researching micromachining and micromachining is not only to reduce the size and volume of mechanical products, but also to explore a new area of technology by exploring and developing new principles and components and systems through miniaturization and integration. Rapid Prototyping is a new manufacturing technology that emerged in the late 1980s with the ability to quickly mold products without the limitations of shape and complexity and without the need for special tools. The application of rapid prototyping technology in the field of micromachining is a new international technology emerging in recent years. Due to its unique characteristics, it has received extensive attention from international academic circles.