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基于介质阻挡放电的形式,设计并制作了两种等离子体射流装置:一种内电极裸露;另一种内电极覆盖有石英玻璃。笔者对两种不同电极等离子体射流装置的特性进行了测量。在中频正弦电源通入Ar的情况下,测量了放电的李萨如(Lissajous)图、放电的图像和放电的光谱图;并且分别由放电的Lissajous图和光谱图,计算得到了放电的功率和电子激发温度。实验结果表明:在外施电压保持不变的情况下,气流对于放电的功率和电子的温度几乎没有影响;通过对比两种射流装置的电学和光学特性发现,与内电极覆盖有石英玻璃的等离子体射流装置相比,内电极裸露的情况下,其放电的功率和电子激发温度均比较大。
Two types of plasma jet devices were designed and fabricated based on the dielectric barrier discharge: one type of inner electrode exposed and the other type of inner electrode covered with quartz glass. The author measured the characteristics of two different electrode plasma jet devices. The Lissajous graph of discharge, the image of discharge and the spectrum of discharge were measured under the condition that the medium frequency sinusoidal power was supplied to Ar, and the discharge power was calculated from the discharged Lissajous diagram and the spectrum respectively Electron excitation temperature. The experimental results show that the airflow has little effect on the discharge power and the electron temperature under the condition that the applied voltage remains unchanged. By comparing the electrical and optical characteristics of the two jet devices, it is found that with the plasma with the inner electrode covered with quartz glass Compared with the jet device, the internal electrodes are exposed, the discharge power and electron excitation temperature are relatively large.