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为了提高SU-8光刻胶的微加工分辨率,利用飞秒激光双光子聚合技术研究了SU-8光刻胶微加工时的加工工艺条件与分辨率之间的关系。实验在本研究组自主研制的纳米光子学超细微加工系统上进行,以钛蓝宝石飞秒激光器发出的780nm波长激光作为加工光源,考察了不同激光功率与曝光时间等激光加工条件和后烤与无后烤等工艺条件对SU-8聚合点形貌与尺寸的影响。在后烤工艺条件下获得的最小加工点直径为0.22μm,而无后烤过程的加工结果中这一数值为0.47μm。实验结果表明,降低激光功率和缩短曝光时间可以获得尺寸较小的聚合点,后烤工艺有利于降低加工能量并提高加工分辨率,实验结果与基于双光子聚合加工理论的模拟分析具有良好的一致性。
In order to improve the micro-fabrication resolution of SU-8 photoresist, the relationship between processing conditions and resolution of SU-8 photoresist during microfabrication was studied using femtosecond laser two-photon polymerization technique. Experiments were carried out on the nano-photonics ultra-fine micro-processing system independently developed by our research group. The 780nm wavelength laser emitted by titanium-sapphire femtosecond laser was used as the processing light source. The laser processing conditions such as laser power and exposure time, After-roasting and other process conditions SU-8 polymerization point morphology and size. The minimum diameter at the post-bake process was 0.22 μm, compared to 0.47 μm in the post-bake process. The experimental results show that the smaller polymerization points can be obtained by reducing the laser power and the exposure time, and the post-baking process is favorable for reducing the processing energy and improving the processing resolution. The experimental results are in good agreement with the simulation analysis based on the theory of two-photon polymerization Sex.