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我们已经研制出了飞行时间 ＴＯＦ（Ｔｉｍｅ ｏｆ Ｆｌｉｇｈｔ）方法电荷态分布测量系统，并用该系统测定了ＭＥＶＶＡ（ＭｅｔａｌＶ ｐｏｒ Ｖａｃｕｕｍ Ａｒｃ）源产生离子的电荷态分布。在实验中，把ＭＥＶＶＡ源作为产生离子的手段；ＭＥＶＶＡ源是一种新型的离子源，该源阴极材料及运行条件较宽，能够产生强流的多电荷态离子。电荷态谱是用ＴＯＦ方法获得的，同时也测量了弧流及弧压降。在本文中，将介绍 ＴＯＦ方法测量电荷态的原理、结构和一些初步的实验结果，对 ＭＥＶＶＡ源也作了必要的介绍。
We have developed a Time of Flight (TOF) method for the charge-state distribution measurement system and used this system to determine the charge-state distribution of the ions produced by the MEVVA (MetalV por Vacuum Arc) source. In experiments, the MEVVA source was used as a means to generate ions; the MEVVA source was a novel ion source that had a wide range of operating conditions and was capable of generating highly-charged, multi-charged ions. The charge state spectrum was obtained by TOF method, and the arc current and arc voltage drop were also measured. In this paper, the principle, structure and some preliminary experimental results of the TOF method for measuring the charge state will be introduced. The MEVVA source is also introduced as necessary.