Damage produced on GaN surface by highly charged Krq+ irradiation

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Surface morphology, compositions, microstructure and optical properties of GaN film irradiated by highly charged Krq? (q = 23, 15, 11) in two geometries to a fluence of 1 9 1015 krq?/cm2 were studied using AFM,XPS, PL, Raman scattering and UV–visible spec
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