采用超自对准工艺技术(SST),制成了一种8位精度的超高速单片数模转换器(DAC)。为了改进由建立速度、时钟馈通噪声和低频干扰确定的动态精度,研究了包括上升和下降时间控制开关驱动器、低噪声触发器和差分缓冲结构在内的多种新颖电路技术。此外,还研究了一种利用多层陶瓷基片的新的芯片组装技术。性能测试表明:达到8位精度的建立时间约为2毫微秒,最大转换速率达1GHz,低频干扰能量为2ps.V,无修正情况下,可达到10位线性误差精度。 Using super-aligned technology (SST), a 8-bit precision ultra-high speed monolithic digital-to-analog converter (DAC) In order to improve the dynamic accuracy determined by setup speed, clock feedthrough noise and low frequency interference, a variety of novel circuit technologies including rising and falling time controlled switch drivers, low noise flip-flops, and differential buffer structures are investigated. In addition, a new chip assembly technology using a multilayer ceramic substrate has been studied. Performance tests show that the 8-bit settling time is about 2 nanoseconds, the maximum slew rate is 1GHz, the low-frequency interference energy is 2ps.V, and the 10-bit linear error precision can be achieved without correction.