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根据曲轴宽电子束聚焦理论,研究了一种用曲轴轨迹确定轴外点扩散分布的方法。这种新方法可在保持与传统方法相同的精度条件下,减小电子光学传递函数的计算量,提高计算速度,对大物面成象系统的计算具有实际意义。
According to the beam focusing theory of crankshaft width, a method to determine the spread distribution of off-axis points by crankshaft trajectory is studied. This new method can reduce the calculation of electron optical transfer function and improve the calculation speed under the same precision as the traditional method, which is of practical significance for the calculation of the large object imaging system.