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高精度的微定位平台是精密定位技术研究的重要内容之一。采用柔顺机构作为微定位机构及压电陶瓷作为驱动器,设计了一种3自由度精密微定位平台。首先,对设计的微定位平台进行了理论分析,得出了该平台的理论输入与输出关系,同时确定了其行程范围。然后,采用ANSYS有限元方法对该平台在给定输入情况下的变形进行了分析,并对其输出位移进行了仿真。分析结果表明,设计的3自由度微定位平台理论分析结果和仿真分析结果基本吻合。最后,根据分析结果,制作了微定位平台样机。这种高精度的微定位平台在精密定位领域有着广泛的应用前景。
High-precision micro-positioning platform is one of the important contents of precision positioning technology. Using the compliant mechanism as the micro-positioning mechanism and the piezoelectric ceramic as a driver, a 3-DOF precision micro-positioning platform is designed. First of all, the theoretical analysis of the micro-positioning platform is made, the relationship between the theoretical input and output of the platform is obtained, and the range of its travel is determined. Then, the ANSYS finite element method was used to analyze the deformation of the platform under a given input and the output displacement was simulated. The analysis results show that the theoretical analysis results of the 3 DOF micro-positioning platform are in good agreement with the simulation results. Finally, based on the analysis results, a prototype of micro-positioning platform was made. This high-precision micro-positioning platform has a wide range of applications in the field of precision positioning.