(2)俄歇电子能谱法用电子束照射固体表面时,除了产生特征X射线外,还会放出俄歇电子,如图6所示。其机理大致如下:试样受到电子轰击,先放出K层电子,则该层便出现空穴。L电子填补K层空穴,使体系稳定化并放出相当于两个能级之差的剩余能量(△E=E_K-E_L)。此时,若L层的其他电子吸收了这剩余能量,该电子即会被放出体系之外。 (2) Auger electron spectroscopy electron beam irradiation solid surface, in addition to produce characteristic X-ray, but also release Auger electrons, as shown in Figure 6. The mechanism is as follows: The sample was electron bombardment, K-layer first release of electrons, then the layer will appear hollow. L electrons fill the K-layer holes, stabilizing the system and releasing the residual energy equivalent to the difference between the two energy levels (ΔE = E_K-E_L). At this point, if other electrons in the L layer absorb the residual energy, the electrons will be released outside the system.