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对铝上磁控溅射离子镀铀及铀上磁控溅射离子镀铝的膜的沉积生长方式及界面的显微组织情况进行了研究。铝上磁控溅射离子镀铀界面上与铝接触的深层铀膜呈不定形结构,没有形成铀晶粒。铀膜表面由许多直径只有 10～20 nm 微晶态的铀的小颗粒组成,部分微晶态的铀已经开始长大,并呈现出多晶化的特征。Cu 和 Fe 杂质降低了铀镀层与铝基体之间的应力,界面结合处未产生大量明显的裂纹。铀上磁控溅射离子镀铝界面附近呈现多种显微组织。铝膜在铀基体上生长时,首先在有部分氧化的铀基体上形成某一种或几种铀铝化合物颗粒,随后形核生长成铝的小晶粒,部分小晶粒首先逐渐长大,形成倒立锥体状较大晶粒,大晶粒的上端逐步接近,形成一个整体的生长平台,在这个生长平台上,晶粒上端的外围原子在生长过程调整排列的取向,生长出渐渐变细的正立的锥体。铝膜生长过程中在铀基体结合处有较大应力,导致大量明显裂纹。
The deposition growth mode and interface microstructure of the films deposited by magnetron sputter ion plating of uranium and magnetron sputtered ion plating on uranium were studied. The deep uranium film in contact with aluminum on the magnetron sputtered ion plating uranium interface on aluminum was amorphous and did not form uranium grains. The surface of the uranium film consists of many small particles of uranium with a crystallite size of only 10-20 nm in diameter. Part of the microcrystalline uranium has begun to grow and is characterized by polycrystallization. The Cu and Fe impurities reduce the stress between the uranium coating and the aluminum matrix, and do not produce a large number of obvious cracks at the interface junction. Uranium on the magnetron sputtering ion plating aluminum interface presents a variety of microstructures. When the aluminum film grows on the uranium matrix, firstly, one or several uranium-aluminum compound particles are formed on the partially oxidized uranium matrix, and then nucleate and grow into small crystal grains of aluminum. Some small crystal grains grow up gradually at first, The formation of inverted cone-shaped larger grains, the upper end of large grains gradually close to form a whole growth platform, in this growth platform, the upper outer periphery of the grain in the growth process to adjust the orientation of alignment, growing to become tapered Upright Cone. During the growth of aluminum film, there is greater stress in the joint of uranium matrix, resulting in a large number of obvious cracks.