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We investigate the dispersion properties of nanometer-scaled silicon nitride suspended membrane waveguides around the communication wavelength and systematically study their relationship with the key structural parameters of the waveguide.The simulation results show that a suspended membrane waveguide can realize anomalous dispersion with a relatively thinner silicon nitride thickness in the range of 400 to 600 nm,whereas,for the same membrane thickness,a conventional rib or strip silicon nitride waveguide cannot support anomalous dispersion.In particular,a waveguide with 400 nm silicon nitride thickness and deep etch depth(r = 0.05) exhibits anomalous dispersion around the communication wavelength when the waveguide width ranges from 990 to1255 nm,and the maximum dispersion is 22.56 ps/(nm·km).This specially designed anomalous dispersion silicon nitride waveguide is highly desirable for micro-resonator based optical frequency combs due to its potential to meet the phase-matching condition required for cascaded four-wave-mixing.
We investigate the dispersion properties of nanometer-scaled silicon nitride suspended membrane waveguides around the communication wavelength and systematically study their relationship with the key structural parameters of the waveguide. The simulation results show that a suspended membrane waveguide can realize anomalous dispersion with a relatively thinner silicon nitride thickness in the range of 400 to 600 nm, while, for the same membrane thickness, a conventional rib or strip silicon nitride waveguide can not support anomalous dispersion. In particular, a waveguide with 400 nm silicon nitride thickness and deep etch depth (r = 0.05) exhibits anomalous dispersion around the communication wavelength when the waveguide width ranges from 990 to 1255 nm, and the maximum dispersion is 22.56 ps / (nm · km) .This specially designed anomalous dispersion silicon nitride waveguide is highly desirable for micro-resonator based optical frequency combs due to its potential to meet the phase-matching cond ition required for cascaded four-wave-mixing.