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氮化钛、碳化钛和氧化铝硬质涂层是广泛用于改善高速钢和硬质合金刀具使用性能和产量的涂层材料。然而在三元氮化物沉积方面研究得还很少。本文论述了用阴极弧光放电工艺沉积三元氮化物(Ti,Zr)N和(Ti,Al)N的特性,对涂层进行了表面形貌、成份和机械性能测试,对这些涂层还进行了抗磨损性能和装饰性能的评估,并将结果与同样方法制备的TiN和(Ti-6Al-4V)N薄膜作了比较。
Titanium nitride, titanium carbide and alumina hard coatings are coating materials widely used to improve the serviceability and yield of high speed steel and carbide tools. However, few studies have been done on ternary nitride deposition. In this paper, the characteristics of ternary nitrides (Ti, Zr) N and (Ti, Al) N deposited by cathodic arc discharge are discussed. The coatings are also tested for their surface topography, composition and mechanical properties. The abrasion resistance and the decorative properties were evaluated and the results were compared with TiN and (Ti-6Al-4V) N films prepared by the same method.