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报导一种新型微束X荧光分析谱仪 ,它由导管X光透镜和使用位置灵敏正比计数管的波长色散谱仪组成 .谱仪具有高空间分辨 ,高能量分辨和高灵敏度的特点 .从实验上研究了影响谱仪能量分辨的各种因素及用于稀土元素L线分析的可能性 .实验结果表明谱仪使用X光透镜形成的X光微束的最小束径对Mo Kα 线为 30 μm ,谱仪对Ti Kα 线的能量分辨为 4 .4eV ,对稀土元素L线的最低探测极限达到 10 - 10 g .
Reported a new type of micro-beam X-ray fluorescence spectrometer, which consists of a catheter X-ray lens and the use of position sensitive proportional counter wavelength dispersive spectrometer composed of spectrometer with high spatial resolution, high energy resolution and high sensitivity characteristics from the experiment The various factors affecting the energy resolution of the spectrometer and the possibility of using the L-ray analysis of the rare earth element are studied.The experimental results show that the minimum beam diameter of the X-ray microbeam formed by the X-ray lens is 30 μm , The spectrometer can distinguish the energy of Ti Kα line as 4. 4eV and the minimum detection limit of L line for rare earth element reaches 10 - 10 g.