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介绍了六氟化钨的性质、应用及目前的发展状况,针对六氟化钨区别于其它电子气体的特殊性质,综述了对其中所含气体杂质和金属粒子的分析方法。
The properties, applications and current development of tungsten hexafluoride are introduced. According to the special properties of tungsten hexafluoride distinguished from other electronic gases, the methods for the analysis of gas impurities and metal particles contained therein are reviewed.