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本文介绍了脉冲真空弧离子源的特点,建立了脉冲真空弧离子源工作瞬间放气成分的质谱分析系统。应用四极质谱仪记录了真空系统中离子源工作前后的谱图,并通过数据软件的二次处理初步取得了脉冲真空弧离子源放电空间的增量成分分析;开展了不同绝缘介质对脉冲真空弧离子源工作瞬间所产生气体成分的对比研究。
In this paper, the characteristics of pulsed vacuum arc ion source are introduced, and the mass spectrometry system of pulsed vacuum arc ion source is established. The quadrupole mass spectrometer was used to record the spectra before and after the ion source working in the vacuum system. The incremental component analysis of the discharge space of the pulsed vacuum arc ion source was obtained through the secondary processing of the data software. COMPARISON OF THE GAS COMPOSITION OF AN ARC ENERGY SOURCE WHEN IT WORKS.