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三氯氢硅氢还原工序是改良西门子法生产多晶硅的核心技术,文章对三氯氢硅氢还原工序的工艺条件和物料能耗进行了探讨,分别从工艺参数、生成反应器及辅助装置提出了一些节能减排的措施。
Hydrogen trichlorosilane hydrogen reduction process is to improve the Siemens production of polysilicon core technology, the article of hydrogen trichlorosilane hydrogen reduction process conditions and material energy consumption were discussed from the process parameters, the reactor and auxiliary devices were proposed Some measures to save energy and reduce emissions.