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A novel microring resonator accelerometer is proposed. It is realized by a suspended straight waveguidecoupled with a microring resonator. Under the external acceleration, the coupling coefficient is a functionof gap spacing between the two waveguides. The mathematical model of the sensing element is established.Both the finite element method and coupled mode theory are adopted to analyze and optimize the proposedstructure. Simulation results show that the mechanical sensitivity is 0.015 μm/g with the working frequencybelow 500 Hz and cross-axis sensitivity less than 0.001%, which is promising in seismic related applications.
It is realized by a suspended straight waveguide coupled with a microring resonator. Under the external acceleration, the coupling coefficient is a function of gap spacing between the two waveguides. The mathematical model of the sensing element is established. the finite element method and coupled mode theory are adopted to analyze and optimize the proposed structure. Simulation results show that the mechanical sensitivity is 0.015 μm / g with the working frequency of 500 Hz and cross-axis sensitivity less than 0.001%, which is promising in seismic related applications.