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以二苯基二羟基硅烷(diphenylsilanediol,DPSD)和γ-甲基丙烯酰氧基丙基三甲氧基硅烷(γ-Methacryloxypropyl trimethoxy silane,MAPTMS)为前驱体,用无水溶胶-凝胶法合成出有机-无机杂化材料,将其旋涂在硅基片和石英玻璃片上得到杂化光波导薄膜。利用Abbe折射仪测试薄膜的折射率,用Fourier红外光谱仪和Raman光谱仪测试了薄膜的红外吸收光谱和Raman散射光谱,用紫外-可见-近红外分光光度计测试了薄膜的光吸收性质,用棱镜耦合法测试薄膜的光传输损耗。结果表明:控制DPSD的加入量可以调节薄膜的折射率(1.471～1.515);杂化材料在可见和近红外区域的光透过率在90%以上;在265nm处存在强烈的苯环K带吸收峰;薄膜的光传输损耗约为1.0dB/cm。
The precursor was synthesized by anhydrous sol-gel method using diphenylsilanediol (DPSD) and γ-methacryloxypropyltrimethoxysilane (MAPTMS) as precursors Organic-inorganic hybrid material, which is spin-coated on a silicon substrate and a quartz glass plate to obtain a hybrid optical waveguide film. The refractive index of the films was measured by Abbe refractometer. The infrared absorption spectra and Raman scattering spectra of the films were measured by Fourier infrared spectroscopy and Raman spectroscopy. The light absorption properties of the films were measured by UV - Vis - NIR spectrophotometer. Method of testing the optical transmission loss of the film. The results show that the refractive index (1.471 ~ 1.515) can be adjusted by controlling the amount of DPSD. The light transmittance of the hybrid material in the visible and near infrared region is over 90%. Strong benzene K band absorption exists at 265 nm Peak; light transmission loss of the film is about 1.0dB / cm.