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设计了一台双光路自相关的透反射率测量系统,实验测试了3种不同形态激光作光源时,系统的单点透反射率重复性精度,验证了光源的功率和偏振稳定性对此系统的影响较小。在验证性分析的基础上完善了系统的稳定性,并对系统精度进行校准。实验结果显示,在置信度为95%时,系统的重复不确定性能稳定在0.04%左右,满足大口径低透射率、低反射率光学元件均匀性测量的精度要求,为此类仪器设计提供了参数选择依据。
A dual optical path autocorrelation system of reflectivity measurement was designed. The repeatability of single point reflectivity of the system was experimentally tested when three kinds of laser were used as light source. The power and polarization stability of the light source were verified. Less affected. On the basis of confirmatory analysis, the stability of the system is improved and the system accuracy is calibrated. The experimental results show that the uncertainty of the system is stable at 0.04% when the confidence is 95%, which meets the accuracy requirements of measuring the uniformity of large diameter low transmittance and low reflectivity optics. Parameter selection basis.