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为了解决SiC硬质膜力学性能难测试的问题,提出以Oliver-Pharr模型为基础的位移敏感压痕技术来评价SiC硬质膜的硬度及弹性模量。为了解其可靠性,将此方法用于普通玻璃和不锈钢作为参考。选用厚度为315±15μm的化学气相沉积(CVD)SiC硬质膜作为样品,实验以0.5N/s的载荷速度进行加卸载,载荷峰值取10～30N,结果表明:位移敏感压痕法计算出的普通玻璃和不锈钢的硬度分别为6.5GPa和1.7GPa,传统显微硬度计测试出的结果分别为5.3GPa和1.8GPa,其值比较接近;此方法计算出普通玻璃和不锈钢的弹性模量分别为65.1GPa和178.4GPa,与实际值70GPa和190GPa误差很小,因此表明该方法可靠性良好。利用位移敏感压痕技术得知CVDSiC硬质膜的硬度和弹性模量为37.7GPa和456.4GPa。另外根据维氏压痕形貌,应用JISR1607-1990标准,Anstis,Evans&Charles三断裂韧性公式,计算出普通玻璃和CVDSiC硬质膜KIC均值分别为0.78MPa.m1/2和2.70MPa.m1/2。此方法可广泛用于评价硬质膜的硬度和弹性模量等力学性能。
In order to solve the difficult problem of testing the mechanical properties of SiC hard coatings, the displacement-sensitive indentation technique based on the Oliver-Pharr model was proposed to evaluate the hardness and elastic modulus of SiC hard coatings. To understand its reliability, this method is used for ordinary glass and stainless steel as a reference. The CVD hard SiC film with a thickness of 315 ± 15μm was selected as the sample. The loading and unloading was carried out at a loading rate of 0.5N / s and the peak load was 10 ~ 30N. The results showed that displacement-sensitive indentation method Of the ordinary glass and stainless steel hardness of 6.5GPa and 1.7GPa, the traditional microhardness tester test results were 5.3GPa and 1.8GPa, its value is relatively close; this method calculates the ordinary glass and stainless steel elastic modulus 65.1GPa and 178.4GPa, with the actual value of 70GPa and 190GPa error is very small, thus indicating the reliability of the method. The hardness and elastic modulus of CVDSiC hard films were 37.7GPa and 456.4GPa using displacement-sensitive indentation technique. In addition, according to Vickers indentation morphology, the KIC mean values of ordinary glass and CVD SiC hard film were calculated to be 0.78MPa.m1 / 2 and 2.70MPa.m1 / 2 using JISR1607-1990, Anstis, Evans & Charles fracture toughness formula respectively. This method can be widely used to evaluate the hardness and elastic modulus of the hard film and other mechanical properties.