设计了一种Z轴完全差分电容式加速度传感器,交错梳齿、两组对称可动梳齿通过挠性梁连接在固定衬底上,对称布局使结构稳定并解决了X和Y轴向对Z轴向加速度检测的耦合干扰。对传感器在敏感方向加速度作用下的偏转特性进行分析,给出了相关理论模型并对其求解。对传感器在非敏感方向加速度作用下的扭转变形进行分析,计算该扭转对Z轴检测产生的干扰与结构之间的关系。通过结构的优化设计,使传感器在设计的量程范围内达到最佳检测效果。利用ANSYS进行模拟分析,得到该传感器的灵敏度为0.31 fF/g,验证了本设计分析的合理性、可行性和精确性。 A Z-axis fully differential capacitive accelerometer is designed with interleaved comb teeth. The two symmetrical movable comb teeth are connected to a fixed substrate by flexible beams. The symmetrical layout stabilizes the structure and solves the problem that the X and Y axial pairs of Z Coupling Interference in Axial Acceleration Detection. The deflection characteristics of the sensor under the acceleration in the sensitive direction are analyzed. Relevant theoretical models are given and solved. The torsional deformation of the sensor under acceleration in the non-sensitive direction is analyzed, and the relationship between the torsional disturbance and the structure caused by Z-axis detection is calculated. Optimized design through the structure, so that the sensor in the design range to achieve the best detection results. The simulation analysis with ANSYS shows that the sensitivity of the sensor is 0.31 fF / g, which verifies the rationality, feasibility and accuracy of the design analysis.