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复旦大学化学蒸汽淀积(CVD)研究室在国际上首次提出CVD理论三模型,即热壁低压CVD工艺模拟模型,CVD钨工艺中的半封闭结构模型,激活低压金刚石生长热力学模型。预计最有影响力的将是第3个模型,它涉及物理、化学、材料、生物和人文科学(如哲学)等,具有较广泛的意义。近二、三十年中一再证实能在激活低压条件下生长金刚石,同时石墨会被腐蚀掉。这一实验事实与传统的平衡热力学观点相背离。在通常的平衡低压条件下,金刚石是亚稳态而石墨是稳态。我们的理论模型则根据非平衡热力学定量化地计算比较金刚石与石墨的稳定性并与大量实验事实相符。在低压下,为什么能合成人造金刚石这一理论难题的解决,将
Fudan University Chemical vapor deposition (CVD) Laboratory for the first time in the world put forward three theoretical model of CVD, that is, hot wall low pressure CVD process simulation model, CVD tungsten process semi-closed structural model, activated low-pressure diamond growth thermodynamic model. It is expected that the most influential one will be the third model, which is of broader significance in physics, chemistry, materials, biology and humanities (such as philosophy). Over the past two or three decades, it has been repeatedly confirmed that diamond can be grown under the condition of activating low pressure, and graphite will be eroded away. This experimental fact departs from the traditional view of equilibrium thermodynamics. Under the conditions of normal equilibrium low pressure, the diamond is metastable and the graphite is steady. Our theoretical model is based on the non-equilibrium thermodynamics to quantitatively compare the stability of diamond with graphite and with a large number of experimental facts. Under low pressure, why synthetic diamond can solve this theoretical problem will be