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本文利用光栅信号质量谐波分析测定法,讨论了光栅系统中某些参数对光栅信号质量的影响并给出了在光栅系统设计中合理确定光栅系统参数的依据。
In this paper, the grating signal quality harmonic analysis is used to measure the influence of some parameters of the grating system on the grating signal quality and the basis for the reasonable determination of the grating system parameters in the grating system design is given.