表面科学及其应用只有二十年左右的历史,如今它已成为当代科学八大生长点之一。电子能谱深度剖析技术在表面科学及其应用中,占有重要地位。本文将就:一、电子能谱深度剖析的意义;二、深度剖析的方式及实施;三、应用举例;四、相对浓度及剖析深度的求算;五、存在问题等五个方面进行简要介绍。 Surface science and its applications are only about two decades old, and today it has become one of the eight major growth points of contemporary science. Electronic spectrum depth profiling technology plays an important role in surface science and its applications. This article will: First, the significance of the depth of the electronic spectrum analysis; Second, the depth of analysis and implementation; Third, the application examples; Fourth, the relative concentration and depth analysis; Fifth, there are five issues such as a brief introduction .