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本文提出并研究了新型的“台阶阴极”和“曲面阴极”真空微电子压力传感器，与普通的真空微电子压力传感器相比，新型传感器的阴极发射电流大大提高，使得输出信号易于检测，抗噪声能力增强，并在改善输出信号线性、提高灵敏度和扩展量程方面有很大优势．本文绘出了计算机模拟结果，简述了台阶阵列阴极和阳板压力敏感膜的制作，并展示了SEM照片．
In this paper, a new type of vacuum microelectronic pressure sensor with “step cathode” and “curved cathode” is proposed and studied. Compared with the common vacuum microelectronic pressure sensor, the new sensor’s cathode emission current is greatly improved, making the output signal easy to detect, Enhanced capabilities and great advantages in improving output signal linearity, increasing sensitivity and extending range. In this paper, computer simulation results are drawn, and the fabrication of the step-array cathode and male plate pressure-sensitive films is briefly described. SEM photographs are also presented.