ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：huaxf

【摘要】

：

Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically unde

【作者】

：

项金钟郑志豪廖常庚熊京汪永强张仿清

【出处】

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核技术：英文版

【发表日期】

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1992年1期

【关键词】

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ION IMPLANTATION DIAMOND-LIKE FILM Ion implantation Diamond-like film

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Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The resistivities of the implanted films decreased dramatically under a dose of 2×1016 Ar/cm2 . IR spectra and optical gap Eopt were measured. It was found th

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ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS

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