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采用非晶态多核配合物作为前驱体的方法在单晶硅表面成功地制备了钙钛矿型的复合金属氧化物Gd_2CuO_4薄膜,XPS研究表明所制备出的薄膜由Gd_2CuO_4复合金属氧化物组成.XRD研究表明经600℃热处理形成的复合氧化物薄膜以钙钛矿型晶相结构存在,也进一步证实了所制备出的薄膜是Gd_2CuO_4复合金属氧化物,其晶粒大小在20nm左右.俄歇电子能谱的深度剖析表明形成的薄膜组成均匀,在界面上有一定程度的扩散作用.运用AES揭示了Gd_2CuO_4薄膜的厚度与前驱体溶液中前驱体的质量分数以及添加剂的影响规律.SEM研究表明前驱体配合物的质量分数越低,形成的薄膜越薄,其表面织构越均匀.当前驱体的质量分数超过一定值后,形成的薄膜具有很多微裂纹.添加剂聚乙二醇对形成的薄膜厚度没有明显的影响,但可以明显改善薄膜的织构,使复合氧化物在衬底上分散得更均匀,抑制微裂纹的产生.
The perovskite-type composite metal oxide Gd_2CuO_4 thin films were successfully prepared on the surface of monocrystalline silicon by using amorphous multi-core complexes as precursors. XPS indicated that the prepared films were composed of Gd_2CuO_4 composite metal oxides. The results show that the complex oxide film formed by heat treatment at 600 ℃ exists in the perovskite crystal phase structure and further confirms that the prepared film is Gd_2CuO_4 composite metal oxide with a grain size of about 20nm. Auger electron energy The depth profile of the spectra indicates that the films formed have a uniform composition and a certain degree of diffusion at the interface. The thickness of the Gd 2 CuO 4 thin films and the mass fraction of the precursors in the precursor solution and the influence of the additives are revealed by AES. The lower the mass fraction of the complex, the thinner the film is, the more uniform the surface texture is.When the mass fraction of the precursor exceeds a certain value, the resulting film has many microcracks.The effect of the additive polyethylene glycol on the film thickness No significant effect, but can significantly improve the texture of the film, the composite oxide dispersed more evenly on the substrate, inhibit the micro-cracks Generation.