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微机械技术的发展使微结构加工得以实现。但实际加工常与理论设计间存在加工误差,实际工作环境亦会使工件发生氧化等结构异化,使得理论期望难以实现.本文采用严格耦合波分析(RCWA)法研究了氧化膜及加工误差对微尺度二重铝光栅光学特性产生的影响.结果表明,氧化膜的产生将较大削弱二重光栅光学特性调节优势,且主要散热对应温度也将随氧化膜产生而发生变化.对于加工误差,下部凹槽内角所产生的影响为主导作用,应在加工过程中避免.
The development of micro-mechanical technology to micro-structure processing can be achieved. However, there is processing error between the actual machining theory and the theoretical design, and the actual work environment also causes the structure such as oxidation of the workpiece to be dissimilated, which makes the theoretical expectation difficult to be realized.In this paper, the strict coupling wave analysis (RCWA) Scale double aluminum grating.The results show that the oxide film will greatly weaken the adjustment of the optical characteristics of the dual grating, and the main heatsinking temperature will also change with the oxide film.For the machining error, the lower part The effect of the inner corner of the groove is the dominant one and should be avoided during machining.