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我厂生产的5001型工业激光干涉仪是一种单频激光干涉仪,由激光头和干涉块两个独立的部件所组成。仪器可用于测量长度,也可用以测量小角度、平直度和速度。仪器的主要技术参数如下: 1.分辨率长度:λ/16,λ/8,0.05微米,0.1微米角度:0.2秒平直度:0.2微米/200毫米速度:取样时间分别为0.1秒和1秒 2.测量范围: 长度:0~10米角度:±30分
The 5001 industrial laser interferometer produced by our factory is a kind of single frequency laser interferometer, which consists of two independent components of laser head and interfering block. Instrument can be used to measure length, can also be used to measure small angle, straightness and speed. The main technical parameters of the instrument are as follows: 1. Resolution Length: λ / 16, λ / 8, 0.05 μm, 0.1 μm Angle: 0.2 sec Flatness: 0.2 μm / 200 mm Speed: Sampling times are 0.1 second and 1 second 2. Measuring range: Length: 0 ~ 10 meters Angle: ± 30 minutes