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充分考虑压膜阻尼效应的影响,提出参数激励下时变电容式静电驱动微机电系统的动力学模型,采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性,探讨不同控制电压和频率比对系统幅频响应的影响,分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性,结果表明,微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为,压膜阻尼效应对系统动力特性的影响不可忽视.
Considering the effect of film damping, the dynamic model of the time-varying capacitive electrostatic-driven micro-electro-mechanical system under parameter excitation is proposed. The amplitude-frequency response characteristics of the system under coupled excitation and forced excitation are analyzed by harmonic balance method. The influence of different control voltage and frequency ratio on the amplitude-frequency response of the system was studied. The nonlinear dynamic characteristics of the system were studied with AC voltage amplitude, frequency ratio and film damping ratio as the control parameters. The results show that the micro- Under the excitation of parameters, there are abundant bifurcations and chaotic behaviors. The influence of damping effect on the dynamic characteristics of the system can not be neglected.