研制了1台全反射X射线荧光装置。采用光洁度为λ/20的石英双反射体,X射线经由多次反射后直接进入样品盘,缩短了光程,充分利用了初始光束,因此样品处X射线的强度得到大幅增加。同时采用光洁度为λ/100的石英样品盘,提高了样品激发效率和检测灵敏度。采用Mo靶X光管作为激发源,选用厚度100μm的Zr为滤光片。对25kV和45kV激发电压, A total reflection X-ray fluorescence device was developed. Using a quartz dual reflector with a smoothness of λ / 20, the X-ray enters the sample tray directly after multiple reflections, shortening the optical path and taking full advantage of the initial beam, so the X-ray intensity at the sample is greatly increased. At the same time, a quartz sample plate with a smoothness of λ / 100 is used, which improves the excitation efficiency and the detection sensitivity of the sample. Mo target X-ray tube as the excitation source, the choice of a thickness of 100μm Zr filter. For 25kV and 45kV excitation voltages,